SPTS Xactix XeF2 vapour release etch products
SPTS' Xactix vapour etch systems use XeF2 vapour to isotropically dry etch sacrificial silicon, without stiction and with high selectivity to other materials.
SPTS, Xactix, XeF2, xenon difluoride, silicon etch, isotropic silicon etch, dry silicon etch, vapour phase etching
Is this your site? Certify your site and update informations
