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ZYGO's high-precision noncontact metrology systems use optical interferometry to measure displacement, surface figure, and optical wavefront for yield improvement initiatives in the flat panel display, semiconductor, and industrial markets.
precision, noncontact, measurement, metrology, measuring, instrument, interferometry, interferometer, microscope, optical profiler, surfaces, surface, head, ABS, data storage, disk, optics, optical, flatness, plano, spherical, microroughness, coating, fab
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